Scaling issues and design of MEMS /

Scaling issues and design of MEMS /

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Bibliographic Details
Main Authors: 303337 Baglio, Salvatore, Castorina, Salvatore, Savalli, Nicol
Format:
Language:eng
Published: Chichester, West Sussex : John Wiley & Sons, 2007
Subjects:
Microelectromechanical systems

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