Scaling issues and design of MEMS /
16
| Main Authors: | , , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Chichester, West Sussex : John Wiley & Sons,
2007
|
| Subjects: |
| _version_ | 1796672751136669696 |
|---|---|
| author | 303337 Baglio, Salvatore Castorina, Salvatore Savalli, Nicol |
| author_facet | 303337 Baglio, Salvatore Castorina, Salvatore Savalli, Nicol |
| author_sort | 303337 Baglio, Salvatore |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T19:20:28Z |
| format | |
| id | KOHA-OAI-TEST:137308 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T19:20:28Z |
| publishDate | 2007 |
| publisher | Chichester, West Sussex : John Wiley & Sons, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1373082020-12-19T17:03:16ZScaling issues and design of MEMS / 303337 Baglio, Salvatore Castorina, Salvatore Savalli, Nicol Chichester, West Sussex : John Wiley & Sons,2007eng16PSZJBLMicroelectromechanical systemsURN:ISBN:047001699X (hbk.)URN:ISBN:9780470016992 (hbk.) |
| spellingShingle | Microelectromechanical systems 303337 Baglio, Salvatore Castorina, Salvatore Savalli, Nicol Scaling issues and design of MEMS / |
| title | Scaling issues and design of MEMS / |
| title_full | Scaling issues and design of MEMS / |
| title_fullStr | Scaling issues and design of MEMS / |
| title_full_unstemmed | Scaling issues and design of MEMS / |
| title_short | Scaling issues and design of MEMS / |
| title_sort | scaling issues and design of mems |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT 303337bagliosalvatore scalingissuesanddesignofmems AT castorinasalvatore scalingissuesanddesignofmems AT savallinicol scalingissuesanddesignofmems |