Polymers in microlithography : materials and processes /

Polymers in microlithography : materials and processes /

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Bibliographic Details
Main Authors: Reichmanis, Elsa, 1953-, MacDonald, Scott A., Iwayanagi, Takao, 1949-, American Chemical Society. Division of Polymeric Materials : Science and Engineering
Format:
Language:eng
Published: Washington, DC : American Chemical Society, 1989
Subjects:
Polymers
Photoresists
Microlithography

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