Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET /
PRZSL
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Skudai : Universiti Teknologi Malaysia,
2007
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| _version_ | 1826389033242066944 |
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| author | Razali Ismail, 1960-, author Ismail Saad, 1974-, author Vijay Kumar Arora, author Regional Conference on Solid State Science and Technology (23rd : 2007 : Johor Bahru) |
| author_facet | Razali Ismail, 1960-, author Ismail Saad, 1974-, author Vijay Kumar Arora, author Regional Conference on Solid State Science and Technology (23rd : 2007 : Johor Bahru) |
| author_sort | Razali Ismail, 1960-, author |
| collection | OCEAN |
| description | PRZSL |
| first_indexed | 2024-03-04T20:50:29Z |
| format | |
| id | KOHA-OAI-TEST:167247 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | |
| last_indexed | 2024-03-04T20:50:29Z |
| publishDate | 2007 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:1672472020-12-19T17:04:28ZInvestigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET / Razali Ismail, 1960-, author Ismail Saad, 1974-, author Vijay Kumar Arora, author Regional Conference on Solid State Science and Technology (23rd : 2007 : Johor Bahru) Skudai : Universiti Teknologi Malaysia,2007 PRZSL |
| spellingShingle | Razali Ismail, 1960-, author Ismail Saad, 1974-, author Vijay Kumar Arora, author Regional Conference on Solid State Science and Technology (23rd : 2007 : Johor Bahru) Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET / |
| title | Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET / |
| title_full | Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET / |
| title_fullStr | Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET / |
| title_full_unstemmed | Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET / |
| title_short | Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET / |
| title_sort | investigation on the effects of oblique rotating ion implantation ori for nanoscale vertical double gate nmosfet |
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