Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET /

Investigation on the effects of oblique rotating ion implantation (ORI) for nanoscale vertical double gate NMOSFET /

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Bibliographic Details
Main Authors: Razali Ismail, 1960-, author, Ismail Saad, 1974-, author, Vijay Kumar Arora, author, Regional Conference on Solid State Science and Technology (23rd : 2007 : Johor Bahru)
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Published: Skudai : Universiti Teknologi Malaysia, 2007

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