Micromachining of silicon wafer to mirror finish /

Micromachining of silicon wafer to mirror finish /

Project Paper (Sarjana Muda Kejuruteraan (Mekanikal - Pembuatan)) - Universiti Teknologi Malaysia, 2007

Bibliographic Details
Main Authors: 488017 Law, Chew Sen, Izman Sudin, Fakulti Kejuruteraan Mekanikal
Format:
Published: 2007
Subjects:
Micromachining
Silicon

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