Materials and process characterization for VLSI/

Materials and process characterization for VLSI/

16

Bibliographic Details
Main Authors: 468535 International Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China), Zong, Xiangfu, Wang, Yangyuan, Chen, Jun
Format:
Published: Singapore: World Scientific, 1988
Subjects:
Integrated circuits
Semiconductors

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