Materials and process characterization for VLSI/
16
| Main Authors: | , , , |
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| Published: |
Singapore: World Scientific,
1988
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| Subjects: |
| _version_ | 1826395976495005696 |
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| author | 468535 International Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China) Zong, Xiangfu Wang, Yangyuan Chen, Jun |
| author_facet | 468535 International Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China) Zong, Xiangfu Wang, Yangyuan Chen, Jun |
| author_sort | 468535 International Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China) |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-04T22:29:52Z |
| format | |
| id | KOHA-OAI-TEST:200186 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| last_indexed | 2024-03-04T22:29:52Z |
| publishDate | 1988 |
| publisher | Singapore: World Scientific, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2001862020-12-19T17:05:42ZMaterials and process characterization for VLSI/ 468535 International Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China) Zong, Xiangfu Wang, Yangyuan Chen, Jun Singapore: World Scientific,198816PSZJBLIntegrated circuitsIntegrated circuitsSemiconductorsURN:ISBN:9971506882 |
| spellingShingle | Integrated circuits Integrated circuits Semiconductors 468535 International Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China) Zong, Xiangfu Wang, Yangyuan Chen, Jun Materials and process characterization for VLSI/ |
| title | Materials and process characterization for VLSI/ |
| title_full | Materials and process characterization for VLSI/ |
| title_fullStr | Materials and process characterization for VLSI/ |
| title_full_unstemmed | Materials and process characterization for VLSI/ |
| title_short | Materials and process characterization for VLSI/ |
| title_sort | materials and process characterization for vlsi |
| topic | Integrated circuits Integrated circuits Semiconductors |
| work_keys_str_mv | AT 468535internationalconferenceonmaterialsandprocesscharacterizationforvlsi1988shanghaichina materialsandprocesscharacterizationforvlsi AT zongxiangfu materialsandprocesscharacterizationforvlsi AT wangyangyuan materialsandprocesscharacterizationforvlsi AT chenjun materialsandprocesscharacterizationforvlsi |