Etching performance of silicon wafers with redesigned etching drum /

Thesis (Sarjana Kejuruteraan Mekanikal (Teknologi Pembuatan Termaju)) - Universiti Teknologi Malaysia, 2005

Bibliographic Details
Main Authors:	186505 Rozzeta Dolah, Hamidon Musa, supervisor, Universiti Teknologi Malaysia. Fakulti Kejuruteraan Mekanikal
Format:
Language:	eng
Published:	Skudai : Universiti Teknologi Malaysia, 2006
Subjects:	Semiconductor wafers Etching Silicones
Online Access:	http://eprints.utm.my/9445

Internet

http://eprints.utm.my/9445