Etching performance of silicon wafers with redesigned etching drum /
Thesis (Sarjana Kejuruteraan Mekanikal (Teknologi Pembuatan Termaju)) - Universiti Teknologi Malaysia, 2005
| Main Authors: | , , |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Skudai : Universiti Teknologi Malaysia,
2006
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/9445 |
| _version_ | 1826396122780794880 |
|---|---|
| author | 186505 Rozzeta Dolah Hamidon Musa, supervisor Universiti Teknologi Malaysia. Fakulti Kejuruteraan Mekanikal |
| author_facet | 186505 Rozzeta Dolah Hamidon Musa, supervisor Universiti Teknologi Malaysia. Fakulti Kejuruteraan Mekanikal |
| author_sort | 186505 Rozzeta Dolah |
| collection | OCEAN |
| description | Thesis (Sarjana Kejuruteraan Mekanikal (Teknologi Pembuatan Termaju)) - Universiti Teknologi Malaysia, 2005 |
| first_indexed | 2024-03-04T22:31:53Z |
| format | |
| id | KOHA-OAI-TEST:200860 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-04T22:31:53Z |
| publishDate | 2006 |
| publisher | Skudai : Universiti Teknologi Malaysia, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2008602020-12-19T17:05:44ZEtching performance of silicon wafers with redesigned etching drum / 186505 Rozzeta Dolah Hamidon Musa, supervisor Universiti Teknologi Malaysia. Fakulti Kejuruteraan Mekanikal Skudai : Universiti Teknologi Malaysia,2006engThesis (Sarjana Kejuruteraan Mekanikal (Teknologi Pembuatan Termaju)) - Universiti Teknologi Malaysia, 2005Includes bibliographical references02FEMELSemiconductor wafersEtchingSiliconeshttp://eprints.utm.my/9445 |
| spellingShingle | Semiconductor wafers Etching Silicones 186505 Rozzeta Dolah Hamidon Musa, supervisor Universiti Teknologi Malaysia. Fakulti Kejuruteraan Mekanikal Etching performance of silicon wafers with redesigned etching drum / |
| title | Etching performance of silicon wafers with redesigned etching drum / |
| title_full | Etching performance of silicon wafers with redesigned etching drum / |
| title_fullStr | Etching performance of silicon wafers with redesigned etching drum / |
| title_full_unstemmed | Etching performance of silicon wafers with redesigned etching drum / |
| title_short | Etching performance of silicon wafers with redesigned etching drum / |
| title_sort | etching performance of silicon wafers with redesigned etching drum |
| topic | Semiconductor wafers Etching Silicones |
| url | http://eprints.utm.my/9445 |
| work_keys_str_mv | AT 186505rozzetadolah etchingperformanceofsiliconwaferswithredesignedetchingdrum AT hamidonmusasupervisor etchingperformanceofsiliconwaferswithredesignedetchingdrum AT universititeknologimalaysiafakultikejuruteraanmekanikal etchingperformanceofsiliconwaferswithredesignedetchingdrum |