MEMS and microsystems : design and manufacture /
16
| Autor Principal: | |
|---|---|
| Formato: | |
| Idioma: | eng |
| Publicado: |
Boston : McGraw-Hill,
2002
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| Subjects: |
16
| Autor Principal: | |
|---|---|
| Formato: | |
| Idioma: | eng |
| Publicado: |
Boston : McGraw-Hill,
2002
|
| Subjects: |