Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /

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Bibliografski detalji
Glavni autori: 407174 Paik, Ungyu, Park, Jea-Gun
Format:
Jezik:eng
Izdano: Boca Raton, FL : CRC Press/Taylor & Francis Group, 2009
Teme: