Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices /
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| Main Authors: | , |
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| Format: | |
| Language: | eng |
| Published: |
Boca Raton, FL : CRC Press/Taylor & Francis Group,
2009
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| Subjects: |
| _version_ | 1826403261657120768 |
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| author | 407174 Paik, Ungyu Park, Jea-Gun |
| author_facet | 407174 Paik, Ungyu Park, Jea-Gun |
| author_sort | 407174 Paik, Ungyu |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T00:15:33Z |
| format | |
| id | KOHA-OAI-TEST:235323 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T00:15:33Z |
| publishDate | 2009 |
| publisher | Boca Raton, FL : CRC Press/Taylor & Francis Group, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2353232020-12-19T17:07:08ZNanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / 407174 Paik, Ungyu Park, Jea-Gun Boca Raton, FL : CRC Press/Taylor & Francis Group,2009eng16PSZJBLChemical mechanical planarizationNanoparticlesNanoelectronicsURN:ISBN:9781420059113 (hbk.)URN:ISBN:1420059114 (hbk.) |
| spellingShingle | Chemical mechanical planarization Nanoparticles Nanoelectronics 407174 Paik, Ungyu Park, Jea-Gun Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / |
| title | Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / |
| title_full | Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / |
| title_fullStr | Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / |
| title_full_unstemmed | Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / |
| title_short | Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices / |
| title_sort | nanoparticle engineering for chemical mechanical planarization fabrication of next generation nanodevices |
| topic | Chemical mechanical planarization Nanoparticles Nanoelectronics |
| work_keys_str_mv | AT 407174paikungyu nanoparticleengineeringforchemicalmechanicalplanarizationfabricationofnextgenerationnanodevices AT parkjeagun nanoparticleengineeringforchemicalmechanicalplanarizationfabricationofnextgenerationnanodevices |