Sputtering by particle bombardment III : Characteristics of sputtered particles, technical applications /
40
| Main Author: | |
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| Format: | |
| Published: |
Berlin : Springer-Verlag,
1991
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| Subjects: |
40
| Main Author: | |
|---|---|
| Format: | |
| Published: |
Berlin : Springer-Verlag,
1991
|
| Subjects: |