MEMS, MOEMS, and micromachining II : 3-4 April, 2006, Strasbourg, France /

MEMS, MOEMS, and micromachining II : 3-4 April, 2006, Strasbourg, France /

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Bibliographic Details
Main Authors: Urey, Hakan, 1970-, El-Fatatry, Ayman
Format:
Language:eng
Published: Bellingham, WA : SPIE Press, 2006
Subjects:
Optoelectronic devices
Micromachining
Microelectromechanical systems

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