Silicon wafer bonding technology : for VLSI and MEMS applications /

Silicon wafer bonding technology : for VLSI and MEMS applications /

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Bibliographic Details
Main Authors: Iyer, Subramanian S., Auberton-Herve, Andre J.
Format:
Language:eng
Published: London : INSPEC, 2002
Subjects:
Integrated circuits
Silicon-on-insulator technology
Microelectromechanical systems

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