Iyer, S. S., & Auberton-Herve, A. J. (2002). Silicon wafer bonding technology: For VLSI and MEMS applications. London : INSPEC.
Chicago-čujuhus (17. p.)Iyer, Subramanian S., juo Andre J. Auberton-Herve. Silicon Wafer Bonding Technology: For VLSI and MEMS Applications. London : INSPEC, 2002.
MLA-čujuhus (9. p.)Iyer, Subramanian S., juo Andre J. Auberton-Herve. Silicon Wafer Bonding Technology: For VLSI and MEMS Applications. London : INSPEC, 2002.
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