Silicon wafer bonding technology : for VLSI and MEMS applications /

Silicon wafer bonding technology : for VLSI and MEMS applications /

16

Detalles Bibliográficos
Main Authors: Iyer, Subramanian S., Auberton-Herve, Andre J.
Formato:
Idioma:eng
Publicado: London : INSPEC, 2002
Subjects:
Integrated circuits
Silicon-on-insulator technology
Microelectromechanical systems

Títulos similares