Silicon wafer bonding technology : for VLSI and MEMS applications /

Silicon wafer bonding technology : for VLSI and MEMS applications /

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Detalhes bibliográficos
Principais autores: Iyer, Subramanian S., Auberton-Herve, Andre J.
Formato:
Idioma:eng
Publicado em: London : INSPEC, 2002
Assuntos:
Integrated circuits
Silicon-on-insulator technology
Microelectromechanical systems

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