Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA /

Instrumentation, metrology, and standards for nanomanufacturing II : 10 August 2008, San Diego, California, USA /

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Bibliographic Details
Main Authors: Postek, Michael T., Allgair, John A. (John Alexander), Society of Photo-Optical Instrumentation Engineers
Format:
Language:eng
Published: Washington : SPIE, 2008
Subjects:
Nanostructured materials
Microfabrication
Nanotechnology

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