Alternative lithography : unleashing the potentials of nanotechnology /

Alternative lithography : unleashing the potentials of nanotechnology /

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Bibliographic Details
Main Author: Sotomayor Torres, Clivia M.
Format:
Language:eng
Published: New York : Kluwer Academic/Plenum Pub, 2003
Subjects:
Molecular electronics
Microlithography
Nanotechnology

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