Alternative lithography : unleashing the potentials of nanotechnology /

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Bibliographic Details
Main Author: Sotomayor Torres, Clivia M.
Format:
Language:eng
Published: New York : Kluwer Academic/Plenum Pub, 2003
Subjects:
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author Sotomayor Torres, Clivia M.
author_facet Sotomayor Torres, Clivia M.
author_sort Sotomayor Torres, Clivia M.
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description 16
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institution Universiti Teknologi Malaysia - OCEAN
language eng
last_indexed 2024-03-05T02:20:51Z
publishDate 2003
publisher New York : Kluwer Academic/Plenum Pub,
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spelling KOHA-OAI-TEST:2771862020-12-19T17:08:57ZAlternative lithography : unleashing the potentials of nanotechnology / Sotomayor Torres, Clivia M. New York : Kluwer Academic/Plenum Pub,2003eng16PSZJBLMolecular electronicsMicrolithographyNanotechnologyURN:ISBN:0306478587(hbk.)
spellingShingle Molecular electronics
Microlithography
Nanotechnology
Sotomayor Torres, Clivia M.
Alternative lithography : unleashing the potentials of nanotechnology /
title Alternative lithography : unleashing the potentials of nanotechnology /
title_full Alternative lithography : unleashing the potentials of nanotechnology /
title_fullStr Alternative lithography : unleashing the potentials of nanotechnology /
title_full_unstemmed Alternative lithography : unleashing the potentials of nanotechnology /
title_short Alternative lithography : unleashing the potentials of nanotechnology /
title_sort alternative lithography unleashing the potentials of nanotechnology
topic Molecular electronics
Microlithography
Nanotechnology
work_keys_str_mv AT sotomayortorrescliviam alternativelithographyunleashingthepotentialsofnanotechnology