Chemical vapor deposition polymerization : the growth and properties of parylene thin films /

Chemical vapor deposition polymerization : the growth and properties of parylene thin films /

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Bibliographic Details
Main Authors: 255226 Fortin, Jefferey B., Lu, T.-M. (Toh-Ming), 1943-
Format:
Language:eng
Published: Boston, Mass. : Kluwer Academic Pubs, 2004
Subjects:
Chemical vapor deposition
Thin films

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