Chemical vapor deposition polymerization : the growth and properties of parylene thin films /
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| Main Authors: | , |
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| Format: | |
| Language: | eng |
| Published: |
Boston, Mass. : Kluwer Academic Pubs,
2004
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| Subjects: |
| _version_ | 1796702244669751296 |
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| author | 255226 Fortin, Jefferey B. Lu, T.-M. (Toh-Ming), 1943- |
| author_facet | 255226 Fortin, Jefferey B. Lu, T.-M. (Toh-Ming), 1943- |
| author_sort | 255226 Fortin, Jefferey B. |
| collection | OCEAN |
| description | 22 |
| first_indexed | 2024-03-05T02:25:54Z |
| format | |
| id | KOHA-OAI-TEST:278846 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T02:25:54Z |
| publishDate | 2004 |
| publisher | Boston, Mass. : Kluwer Academic Pubs, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:2788462020-12-19T17:09:00ZChemical vapor deposition polymerization : the growth and properties of parylene thin films / 255226 Fortin, Jefferey B. Lu, T.-M. (Toh-Ming), 1943- Boston, Mass. : Kluwer Academic Pubs,2004eng22PSZJBLChemical vapor depositionThin filmsURN:ISBN:1402076886 (hbk.) |
| spellingShingle | Chemical vapor deposition Thin films 255226 Fortin, Jefferey B. Lu, T.-M. (Toh-Ming), 1943- Chemical vapor deposition polymerization : the growth and properties of parylene thin films / |
| title | Chemical vapor deposition polymerization : the growth and properties of parylene thin films / |
| title_full | Chemical vapor deposition polymerization : the growth and properties of parylene thin films / |
| title_fullStr | Chemical vapor deposition polymerization : the growth and properties of parylene thin films / |
| title_full_unstemmed | Chemical vapor deposition polymerization : the growth and properties of parylene thin films / |
| title_short | Chemical vapor deposition polymerization : the growth and properties of parylene thin films / |
| title_sort | chemical vapor deposition polymerization the growth and properties of parylene thin films |
| topic | Chemical vapor deposition Thin films |
| work_keys_str_mv | AT 255226fortinjeffereyb chemicalvapordepositionpolymerizationthegrowthandpropertiesofparylenethinfilms AT lutmtohming1943 chemicalvapordepositionpolymerizationthegrowthandpropertiesofparylenethinfilms |