Chemical vapor deposition polymerization : the growth and properties of parylene thin films /

Chemical vapor deposition polymerization : the growth and properties of parylene thin films /

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Bibliographic Details
Main Authors:	255226 Fortin, Jefferey B., Lu, T.-M. (Toh-Ming), 1943-
Format:
Language:	eng
Published:	Boston, Mass. : Kluwer Academic Pubs, 2004
Subjects:	Chemical vapor deposition Thin films

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