Polymers for microelectronics : resists and dielectrics /

Polymers for microelectronics : resists and dielectrics /

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Bibliographic Details
Main Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi, American Chemical Society. Division of Polymeric Materials : Science and Engineering, American Chemical Society Meeting (203rd : 1992 : San Francisco, Calif)
Format:
Published: Washington, DC : American Chemical Society, 1994
Subjects:
Microelectronics
Polymers

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