Control of discharge conditions to reduce hydrogen content in low Z films produced with DC glow /
40
Main Author: | |
---|---|
Format: | |
Published: |
Nagoya, Japan : NIFS,
1995
|
Subjects: |
40
Main Author: | |
---|---|
Format: | |
Published: |
Nagoya, Japan : NIFS,
1995
|
Subjects: |