Study of optical properties of silicon carbide thin film (SiC) deposited by RF magnetron sputtering /

Project Paper (Sarjana Muda Sains Industri (Fizik Bahan)) - Universiti Teknologi Malaysia, 2009

Detalhes bibliográficos
Principais autores:	505694 Lam, Kok Weng,ld1985-, Bakar Ismail, supervisor, Fakulti Sains
Formato:
Idioma:	eng
Publicado em:	2009

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