Study of optical properties of silicon carbide thin film (SiC) deposited by RF magnetron sputtering /

Study of optical properties of silicon carbide thin film (SiC) deposited by RF magnetron sputtering /

Project Paper (Sarjana Muda Sains Industri (Fizik Bahan)) - Universiti Teknologi Malaysia, 2009

Bibliographic Details
Main Authors: 505694 Lam, Kok Weng,ld1985-, Bakar Ismail, supervisor, Fakulti Sains
Format:
Language:eng
Published: 2009
Description
Summary:Project Paper (Sarjana Muda Sains Industri (Fizik Bahan)) - Universiti Teknologi Malaysia, 2009

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