Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /

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Bibliographic Details
Main Author: 290823 Lyshevski, Sergey Edward
Format:
Language:eng
Published: Boca Raton, Fla. : CRC Press, 2005
Subjects:
Microelectromechanical systems
Nanotechnology

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