Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /

16

Bibliographic Details
Main Author:	290823 Lyshevski, Sergey Edward
Format:
Language:	eng
Published:	Boca Raton, Fla. : CRC Press, 2005
Subjects:	Microelectromechanical systems Nanotechnology

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