Enabling technologies for MEMS and nanodevices / edited by H. Baltes ... [et al.]

Enabling technologies for MEMS and nanodevices / edited by H. Baltes ... [et al.]

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Bibliographic Details
Main Author: Baltes, H.
Format:
Language:eng
Published: Weinheim : WILEY-VCH Verlag, 2004
Subjects:
Microelectromechanical systems
Microelectronics
Nanotechnology

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