The structural and optical properties of hydrogenated amorphous carbon (a-C:H) thin films deposited using a direct current-plasma enhanced chemical vapour deposition (DC-PECVD) technique /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2005

Bibliographic Details
Main Author:	384043 Suriani Abu Bakar
Format:
Language:	eng
Published:	Skudai : Universiti Teknologi Malaysia, 2005
Subjects:	Thin films
Online Access:	http://www.psz.utm.my/sla/billing/login.asp?mid=42187

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