Plasma etching in semiconductor fabrication /

Míreanna comhchosúla

• Studies of the chemistry of plasmas used for semiconductor etching
  de réir: Toogood, M, et al.
  Foilsithe / Cruthaithe: (1991)
• Plasma processes for semiconductor fabrication /
  de réir: 414824 Hitchon, W. Nicholas G.
  Foilsithe / Cruthaithe: (1999)
• Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
  de réir: Rossnagel, Stephen M., et al.
  Foilsithe / Cruthaithe: (1990)
• Dry etching for VLSI /
  de réir: 198063 Roosmalen, A. J. Van, et al.
  Foilsithe / Cruthaithe: (1991)
• Plasma etching for fabrication of complex nanophotonic lasers from bonded InP semiconductor layers
  de réir: Jakub Dranczewski, et al.
  Foilsithe / Cruthaithe: (2023-06-01)