Electroceramic-based MEMS : fabrication-technology and applications /
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
New York, NY : Springer,
2005
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| Subjects: |
16
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
New York, NY : Springer,
2005
|
| Subjects: |