Electroceramic-based MEMS : fabrication-technology and applications /
16
| Главный автор: | |
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| Формат: | |
| Язык: | eng |
| Опубликовано: |
New York, NY : Springer,
2005
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| Предметы: |
| _version_ | 1826430745635192832 |
|---|---|
| author | Setter, N. (Nava), 1949- |
| author_facet | Setter, N. (Nava), 1949- |
| author_sort | Setter, N. (Nava), 1949- |
| collection | OCEAN |
| description | 16 |
| first_indexed | 2024-03-05T07:05:10Z |
| format | |
| id | KOHA-OAI-TEST:371839 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T07:05:10Z |
| publishDate | 2005 |
| publisher | New York, NY : Springer, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:3718392020-12-19T17:12:56ZElectroceramic-based MEMS : fabrication-technology and applications / Setter, N. (Nava), 1949- New York, NY : Springer,2005eng16PSZJBLMicroelectromechanical systemsURN:ISBN:0387233105 (hbk.) |
| spellingShingle | Microelectromechanical systems Setter, N. (Nava), 1949- Electroceramic-based MEMS : fabrication-technology and applications / |
| title | Electroceramic-based MEMS : fabrication-technology and applications / |
| title_full | Electroceramic-based MEMS : fabrication-technology and applications / |
| title_fullStr | Electroceramic-based MEMS : fabrication-technology and applications / |
| title_full_unstemmed | Electroceramic-based MEMS : fabrication-technology and applications / |
| title_short | Electroceramic-based MEMS : fabrication-technology and applications / |
| title_sort | electroceramic based mems fabrication technology and applications |
| topic | Microelectromechanical systems |
| work_keys_str_mv | AT setternnava1949 electroceramicbasedmemsfabricationtechnologyandapplications |