Design, fabrication and characterization of capacitively coupled gallium arsenide-based interdigital-gated plasma devices [electronic resource] /
Thesis (Sarjana Kejuruteraan (Elektrik)) - Universiti Teknologi Malaysia, 2010
| Main Authors: | , |
|---|---|
| Format: | |
| Language: | |
| Published: |
2010
|
| Subjects: |