Characterization of amorphous silicon-carbon alloy films (a-Si:C:H) prepared by radio frequency (RF) sputtering [compact disc] /
Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2005
| Main Author: | |
|---|---|
| Format: | |
| Language: | eng |
| Published: |
Skudai : Universiti Teknologi Malaysia,
2005
|
| Subjects: |