MEMS/NEMS : handbook techniques and applications /

MEMS/NEMS : handbook techniques and applications /

Vol. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS

Bibliographic Details
Main Author: Leondes, Cornelius T.
Format:
Language:eng
Published: New York : Springer, 2006
Subjects:
Microelectromechanical systems
Nanotechnology
Online Access:http://www.springerlink.com/content/h0l530/

Internet

http://www.springerlink.com/content/h0l530/

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