MEMS/NEMS : handbook techniques and applications /
Vol. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS
| Автор: | |
|---|---|
| Формат: | |
| Мова: | eng |
| Опубліковано: |
New York : Springer,
2006
|
| Предмети: | |
| Онлайн доступ: | http://www.springerlink.com/content/h0l530/ |
| _version_ | 1826441951572918272 |
|---|---|
| author | Leondes, Cornelius T. |
| author_facet | Leondes, Cornelius T. |
| author_sort | Leondes, Cornelius T. |
| collection | OCEAN |
| description | Vol. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS |
| first_indexed | 2024-03-05T09:51:57Z |
| format | |
| id | KOHA-OAI-TEST:427438 |
| institution | Universiti Teknologi Malaysia - OCEAN |
| language | eng |
| last_indexed | 2024-03-05T09:51:57Z |
| publishDate | 2006 |
| publisher | New York : Springer, |
| record_format | dspace |
| spelling | KOHA-OAI-TEST:4274382020-12-19T17:15:15ZMEMS/NEMS : handbook techniques and applications / Leondes, Cornelius T. New York : Springer,2006engVol. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMSPSZJBLMicroelectromechanical systemsNanotechnologyhttp://www.springerlink.com/content/h0l530/http://www.springerlink.com/content/h0l530/URN:ISBN:0387245200Accessible within UTM campus |
| spellingShingle | Microelectromechanical systems Nanotechnology Leondes, Cornelius T. MEMS/NEMS : handbook techniques and applications / |
| title | MEMS/NEMS : handbook techniques and applications / |
| title_full | MEMS/NEMS : handbook techniques and applications / |
| title_fullStr | MEMS/NEMS : handbook techniques and applications / |
| title_full_unstemmed | MEMS/NEMS : handbook techniques and applications / |
| title_short | MEMS/NEMS : handbook techniques and applications / |
| title_sort | mems nems handbook techniques and applications |
| topic | Microelectromechanical systems Nanotechnology |
| url | http://www.springerlink.com/content/h0l530/ http://www.springerlink.com/content/h0l530/ |
| work_keys_str_mv | AT leondescorneliust memsnemshandbooktechniquesandapplications |