MEMS/NEMS : handbook techniques and applications /
Vol. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS
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| Aineistotyyppi: | |
| Kieli: | eng |
| Julkaistu: |
New York : Springer,
2006
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| Linkit: | http://www.springerlink.com/content/h0l530/ |