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PECVD silicon carbide deposite...
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PECVD silicon carbide deposited at different temperature /
PSZJBL
Bibliographic Details
Main Authors:
B. Zatko, J. Huran
,
Hotovy, I.
,
Pezoldt, J.
Format:
Language:
eng
Subjects:
Silicon carbide
Semiconductors
Holdings
Description
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