PECVD silicon carbide deposited at different temperature /

PECVD silicon carbide deposited at different temperature /

PSZJBL

Dades bibliogràfiques
Autors principals:	B. Zatko, J. Huran, Hotovy, I., Pezoldt, J.
Format:
Idioma:	eng
Matèries:	Silicon carbide Semiconductors

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