PECVD silicon carbide deposited at different temperature /

PECVD silicon carbide deposited at different temperature /

PSZJBL

書誌詳細
主要な著者:	B. Zatko, J. Huran, Hotovy, I., Pezoldt, J.
フォーマット:
言語:	eng
主題:	Silicon carbide Semiconductors

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