PECVD silicon carbide deposited at different temperature /

PECVD silicon carbide deposited at different temperature /

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Detaylı Bibliyografya
Asıl Yazarlar:	B. Zatko, J. Huran, Hotovy, I., Pezoldt, J.
Materyal Türü:
Dil:	eng
Konular:	Silicon carbide Semiconductors

Benzer Materyaller

Advances in silicon carbide processing and applications /
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Silicon carbide /
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Parameter analysis on wire-cut EDM process of silicon carbide [electronic resource] /
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Surface integrity study on silicon carbide machined by wire-cut EDM [electronic resource] /
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Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition /
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Structural and optical properties of silicon carbide quantum dots grown by very high frequency plasma enhanced chemical vapour deposition /
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Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques /
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