Computational lithography /

Includes bibliographical references (p. 217-222) and index.

Bibliographic Details
Main Authors:	Ma, Xu, 1983-, Arce, Gonzalo R.
Format:
Language:	eng
Published:	Hoboken, N.J. : Wiley, c201
Subjects:	Microlithography Integrated circuits Photolithography Semiconductors

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