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Low-temperature PECVD of nanod...
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Low-temperature PECVD of nanodevice-grade nc-3C-SiC/
PSZJBL
Bibliographic Details
Main Authors:
496526 Cheng, Qijin
,
Shuyan, Xu
,
Long, Jidong
,
Ostrikov, Kostya (Ken)
Format:
Language:
eng
Subjects:
Nanocrystals
Silicon carbide
Holdings
Description
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