Mems reliability /

Includes bibliographical references and index

书目详细资料
Main Authors:	515555 Hartzell, Allyson L., Da Silva, Mark G., Shea, Herbert R., Senturia, Stephen D., 1940-
格式:
语言:	eng
出版:	New York : Springer, 2011
主题:	Microelectromechanical systems

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