Electronic thin film reliability /
"Thin films are widely used in the electronic device industry. As the trend for miniaturization of electronic devices moves into the nanoscale domain, the reliability of thin films becomes an increasing concern. Building on the author's previous book, Electronic Thin Film Science by Tu, Ma...
Main Author: | |
---|---|
Format: | |
Language: | eng |
Published: |
Cambridge ; New York : Cambridge University Press,
2010
|
Subjects: |