Optical characterization of annealed silicon carbide (SIC) thin film deposited by RF magnetron sputtering technique /

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2008

Bibliographic Details
Main Authors:	512245 Kartiyani Muniandy, Bakar Ismail, supervisor, Fakulti Sains
Format:
Language:	eng
Published:	2008

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